Fluid handling structure and lithographic apparatus
An immersion lithographic apparatus having a fluid handling structure, the fluid handling structure configured to confine immersion fluid to a region and including: a meniscus controlling feature having an extractor exit on a surface of the fluid handling structure; and a gas knife system outwards o...
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Main Authors | , , , , , , , , , |
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Format | Patent |
Language | English |
Published |
28.03.2023
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Subjects | |
Online Access | Get full text |
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