Systems and methods for providing a beam of charged particles

Disclosed are systems and methods for generating a beam of charged particles, such as an ion beam. Such a system may comprise an interaction chamber configured to support a target, one or more electromagnetic radiation sources, a sensor, and at least one processor. The one or more electromagnetic ra...

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Bibliographic Details
Main Authors Shaham, Assaf, Bespaly, Alexander, Hefets, Ynon, Dey, Indranuj, Papeer, Evgeny, Tsipshtein, Shai
Format Patent
LanguageEnglish
Published 15.11.2022
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Summary:Disclosed are systems and methods for generating a beam of charged particles, such as an ion beam. Such a system may comprise an interaction chamber configured to support a target, one or more electromagnetic radiation sources, a sensor, and at least one processor. The one or more electromagnetic radiation sources may be configured to provide a probe beam at a first energy for determining orientation data of the target and a particle-generating beam at a second energy, which is greater than the first energy, for producing a beam of charged particles. The processor may be configured to receive feedback information from the sensor and to cause a change in a relative orientation between the particle-generating beam and the target.
Bibliography:Application Number: US201917253738