In-plane and out-of-plane disk resonator

• Main Authors: Yu, Pen-Li, Bhave, Sunil A
• Format: Patent
• Language: English
• Published: 08.11.2022
• Subjects: BASIC ELECTRONIC CIRCUITRY; ELECTRICITY; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS

A piezoelectric structure is disclosed which includes a single crystal having piezoelectric coefficients d31 and d32 of opposite magnitude, such that when an alternating electric field is applied in the Z direction, the piezoelectric structure expands in one of the X and Y directions and contracts i...