Target design process for overlay targets intended for multi-signal measurements
A method, system and computer program product for determination of a metrology target design, comprising generating a first candidate target design for a selected design type compatible with one or more metrology tools or and a set of boundaries for a simulation range Measurement of the first target...
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Main Author | |
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Format | Patent |
Language | English |
Published |
01.11.2022
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Subjects | |
Online Access | Get full text |
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