Substrate processing apparatus and substrate processing method

• Main Authors: Iwanaga, Kazuya, Hidaka, Shoichiro, Ikeda, Boui, Sekimoto, Eiichi, Hayashi, Masato
• Format: Patent
• Language: English
• Published: 11.10.2022
• Subjects: BASIC ELECTRIC ELEMENTS; CLEANING; CLEANING IN GENERAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PERFORMING OPERATIONS; PREVENTION OF FOULING IN GENERAL; SEMICONDUCTOR DEVICES; TRANSPORTING

There is provided a substrate processing apparatus, including: a substrate holder configured to hold a substrate with a surface of the substrate on which a concavo-convex pattern is formed oriented upward; a liquid supply unit configured to supply a processing liquid to the substrate held by the sub...