Apparatus and method for measuring the surface temperature of a substrate
An apparatus for measuring surface temperature of a substrate being illuminated by a pulsed light beam configured to heat the substrate and by a beam of probing light, wherein the heated substrate emits a radiated beam of thermal radiation, wherein the apparatus includes an optical system configured...
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Main Author | |
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Format | Patent |
Language | English |
Published |
27.09.2022
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Subjects | |
Online Access | Get full text |
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