Dialkylzinc- and dialkylzinc partial hydrolysate-containing solution, and method for producing zinc oxide thin film using solution

A solution containing a diketone compound having an alkoxy group, a dialkylzinc represented by general formula (1) and/or a partial hydrolysate of the dialkylzinc, and a solvent is described. A method for producing a zinc oxide thin film involves applying the dialkylzinc solution or a solution conta...

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Bibliographic Details
Main Authors Toyota, Kouji, Haga, Kenichi
Format Patent
LanguageEnglish
Published 27.09.2022
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