Dialkylzinc- and dialkylzinc partial hydrolysate-containing solution, and method for producing zinc oxide thin film using solution
A solution containing a diketone compound having an alkoxy group, a dialkylzinc represented by general formula (1) and/or a partial hydrolysate of the dialkylzinc, and a solvent is described. A method for producing a zinc oxide thin film involves applying the dialkylzinc solution or a solution conta...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
27.09.2022
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Subjects | |
Online Access | Get full text |
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