Defect offset correction

• Main Authors: Hsueh, Ya-Hsun, Chuang, Sheng-Hsiang, Pai, Jiun-Rong, Liao, Chien-Ko, Kuo, Shou-Wen, Liu, Hsu-Shui
• Format: Patent
• Language: English
• Published: 30.08.2022
• Subjects: BASIC ELECTRIC ELEMENTS; CALCULATING; COMPUTING; COUNTING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; PHYSICS; SEMICONDUCTOR DEVICES

A method includes: receiving a defect map from a defect scanner, wherein the defect map comprises at least one defect location of a semiconductor workpiece; annotating the defect map with a reference fiducial location of the semiconductor workpiece; determining a detected fiducial location within im...