Three-dimensional semiconductor memory devices

• Main Authors: Jang, Kiseok, Min, Chungki, Seo, Kieun, Hwang, Chang-Sun, Lim, Jongheun
• Format: Patent
• Language: English
• Published: 16.08.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A three-dimensional semiconductor memory device including a peripheral circuit structure on a first substrate, the peripheral circuit structure including peripheral circuits, a second substrate on the peripheral circuit structure, an electrode structure on the second substrate, the electrode structu...