Capacitive sensor housing for chamber condition monitoring

Embodiments disclosed herein include a sensor assembly. In an embodiment, the sensor assembly comprises a sensor module and a housing assembly. In an embodiment, the sensor module comprises a substrate, a capacitor with a first electrode and a second electrode on the substrate, and a capacitive-to-d...

Full description

Saved in:
Bibliographic Details
Main Authors Tae, Patrick John, Pan, Yaoling, Tedeschi, Leonard, Willwerth, Michael D, McCormick, Daniel Thomas
Format Patent
LanguageEnglish
Published 16.08.2022
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:Embodiments disclosed herein include a sensor assembly. In an embodiment, the sensor assembly comprises a sensor module and a housing assembly. In an embodiment, the sensor module comprises a substrate, a capacitor with a first electrode and a second electrode on the substrate, and a capacitive-to-digital converter (CDC) electrically coupled to the first electrode and the second electrode. In an embodiment, the housing assembly is attached to the sensor module and comprises a shaft, wherein the shaft is hollow, and a cap over a first end of the shaft, wherein the cap has an opening to expose the capacitor.
Bibliography:Application Number: US202016812071