Undercut-free patterned aluminum nitride structure and methods for forming the same
A microstructure may be provided by forming a metal layer such as a molybdenum layer over a substrate. An aluminum nitride layer is formed on a top surface of the metal layer. A surface portion of the aluminum nitride layer is converted into a continuous aluminum oxide-containing layer by oxidation....
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
28.06.2022
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Subjects | |
Online Access | Get full text |
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