Monolithic gas-sensing chip assembly and method
A monolithic gas-sensing chip assembly for sensing a gas analyte includes a sensing material to detect the gas analyte, a sensing system including a resistor-capacitor electrical circuit, and a heating element. A sensing circuit measures an electrical response of the sensing system to an alternating...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
12.04.2022
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Subjects | |
Online Access | Get full text |
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