Nonvolatile memory device and method for fabricating the same

A nonvolatile memory device includes a mold structure having a stack of word lines on a substrate and first and second string selection lines on the word lines, a first cutting structure through the mold structure, a second cutting structure through the mold structure, the second cutting structure b...

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Main Authors Kanamori, Kohji, Han, Jee Hoon, Kang, Seo-Goo, Moon, Je Suk, Son, Young Hwan
Format Patent
LanguageEnglish
Published 25.01.2022
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Abstract A nonvolatile memory device includes a mold structure having a stack of word lines on a substrate and first and second string selection lines on the word lines, a first cutting structure through the mold structure, a second cutting structure through the mold structure, the second cutting structure being spaced apart from the first cutting structure, a channel structure penetrating the mold structure to be connected to the substrate, the channel structure being between the first and second cutting structures, a first cutting line cutting through the first string selection line but not through the second string selection line, the first cutting line being between the first and second cutting structures, and a second cutting line cutting through the second string selection line but not through the first string selection line, the second cutting line being between the second cutting structure and the channel structure.
AbstractList A nonvolatile memory device includes a mold structure having a stack of word lines on a substrate and first and second string selection lines on the word lines, a first cutting structure through the mold structure, a second cutting structure through the mold structure, the second cutting structure being spaced apart from the first cutting structure, a channel structure penetrating the mold structure to be connected to the substrate, the channel structure being between the first and second cutting structures, a first cutting line cutting through the first string selection line but not through the second string selection line, the first cutting line being between the first and second cutting structures, and a second cutting line cutting through the second string selection line but not through the first string selection line, the second cutting line being between the second cutting structure and the channel structure.
Author Kanamori, Kohji
Moon, Je Suk
Han, Jee Hoon
Son, Young Hwan
Kang, Seo-Goo
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Snippet A nonvolatile memory device includes a mold structure having a stack of word lines on a substrate and first and second string selection lines on the word...
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Title Nonvolatile memory device and method for fabricating the same
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