MEMS structure, capacitive sensor, piezoelectric sensor, acoustic sensor having mems structure

• Main Authors: Horimoto, Yasuhiro, Inoue, Tadashi, Murakami, Ayumu
• Format: Patent
• Language: English
• Published: 13.07.2021
• Subjects: DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PUBLIC ADDRESS SYSTEMS; TRANSPORTING

A MEMS structure that includes: a substrate having an opening; a diaphragm arranged opposite the opening in the substrate; a plurality of anchors securing the diaphragm to the substrate or to another component; and a fixed membrane surrounding the diaphragm over a slit. The outline of the diaphragm...