Defect discovery and recipe optimization for inspection of three-dimensional semiconductor structures - Bhattacharyya, Santosh; Maher, Christopher; Sharma, Devashish; Hua, Bo; Measor, Philip; Danen, Robert M (2021)
Keywords: CALCULATING; COMPUTING; COUNTING; HANDLING RECORD CARRIERS; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; PRESENTATION OF DATA; RECOGNITION OF DATA; RECORD CARRIERS; TESTING