Bhattacharyya, S., Maher, C., Sharma, D., Hua, B., Measor, P., & Danen, R. M. (2021). Defect discovery and recipe optimization for inspection of three-dimensional semiconductor structures.
Chicago Style (17th ed.) CitationBhattacharyya, Santosh, Christopher Maher, Devashish Sharma, Bo Hua, Philip Measor, and Robert M. Danen. Defect Discovery and Recipe Optimization for Inspection of Three-dimensional Semiconductor Structures. 2021.
MLA (9th ed.) CitationBhattacharyya, Santosh, et al. Defect Discovery and Recipe Optimization for Inspection of Three-dimensional Semiconductor Structures. 2021.
Warning: These citations may not always be 100% accurate.