Semiconductor structures over active region and methods of forming the structures

• Main Authors: Zang, Hui, Shu, Jiehui
• Format: Patent
• Language: English
• Published: 08.06.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The present disclosure generally relates to semiconductor devices and processing. The present disclosure also relates to semiconductor structures disposed over active regions, more particularly, via contact structures disposed over such active regions and to methods of forming such semiconductor str...