Semiconductor structures over active region and methods of forming the structures
The present disclosure generally relates to semiconductor devices and processing. The present disclosure also relates to semiconductor structures disposed over active regions, more particularly, via contact structures disposed over such active regions and to methods of forming such semiconductor str...
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Format | Patent |
Language | English |
Published |
08.06.2021
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Online Access | Get full text |
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Abstract | The present disclosure generally relates to semiconductor devices and processing. The present disclosure also relates to semiconductor structures disposed over active regions, more particularly, via contact structures disposed over such active regions and to methods of forming such semiconductor structures. |
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AbstractList | The present disclosure generally relates to semiconductor devices and processing. The present disclosure also relates to semiconductor structures disposed over active regions, more particularly, via contact structures disposed over such active regions and to methods of forming such semiconductor structures. |
Author | Shu, Jiehui Zang, Hui |
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Snippet | The present disclosure generally relates to semiconductor devices and processing. The present disclosure also relates to semiconductor structures disposed over... |
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SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
Title | Semiconductor structures over active region and methods of forming the structures |
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