Process chamber for cyclic and selective material removal and etching
A method and apparatus for substrate etching are described herein. A processing chamber described herein includes a source module, a process module, a flow module, and an exhaust module. An RF source may be coupled to the chamber and a remote plasma may be generated in the source module and a direct...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
11.05.2021
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Subjects | |
Online Access | Get full text |
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Summary: | A method and apparatus for substrate etching are described herein. A processing chamber described herein includes a source module, a process module, a flow module, and an exhaust module. An RF source may be coupled to the chamber and a remote plasma may be generated in the source module and a direct plasma may be generated in the process module. Cyclic etching processes described may use alternating radical and direct plasmas to etch a substrate. |
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Bibliography: | Application Number: US201614994425 |