Multi-step insulator formation in trenches to avoid seams in insulators

• Main Authors: Chang, Chih-Chiang, Cao, Huy, Liu, Jinping, Huang, Haigou, Sirman, Asli, Shu, Jiehui
• Format: Patent
• Language: English
• Published: 30.03.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Methods produce integrated circuit structures that include (among other components) fins extending from a first layer, source/drain structures on the fins, source/drain contacts on the source/drain structures, an insulator on the source/drain contacts defining trenches between the source/drain conta...