BAW resonators with antisymmetric thick electrodes

• Main Authors: Kim, Dae Ho, Bi, Zhiqiang, Winters, Mary
• Format: Patent
• Language: English
• Published: 29.12.2020
• Subjects: BASIC ELECTRONIC CIRCUITRY; ELECTRICITY; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS

A resonator circuit device. This device can include a piezoelectric layer having a front-side electrode and a back-side electrode spatially configured on opposite sides of the piezoelectric layer. Each electrode has a connection region and a resonator region. Each electrode also includes a partial m...