Semiconductor device and method of manufacturing semiconductor device

• Main Authors: Fujishima, Tatsuya, Shishido, Masayuki, Kajino, Tomonori, Kido, Nozomi
• Format: Patent
• Language: English
• Published: 15.09.2020
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

According to one embodiment, in a semiconductor device, a stacked body is disposed above a substrate. In the stacked body, a conductive film and an insulating layer are alternately disposed in a stacking direction. A semiconductor columnar member penetrates the stacked body in a stacking direction....