Vanadium oxide film and process for producing same

• Main Authors: Nakajima, Tomohiko, Tsuchiya, Tetsuo, Ishizaki, Haruo, Shinoda, Kentaro
• Format: Patent
• Language: English
• Published: 18.08.2020
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMISTRY; COLORIMETRY; COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INORGANIC CHEMISTRY; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; METALLURGY; PHYSICS; RADIATION PYROMETRY; SEMICONDUCTOR DEVICES; TESTING

Provided is a vanadium oxide film which shows substantially no hysteresis of resistivity changes due to temperature rising/falling, has a low resistivity at room temperature, has a large absolute value of the temperature coefficient of resistance, and shows semiconductor-like resistance changes in a...