Semiconductor devices with graded dopant regions
Most semiconductor devices manufactured today, have uniform dopant concentration, either in the lateral or vertical device active (and isolation) regions. By grading the dopant concentration, the performance in various semiconductor devices can be significantly improved. Performance improvements can...
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Main Author | |
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Format | Patent |
Language | English |
Published |
04.08.2020
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Subjects | |
Online Access | Get full text |
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