Surface acoustic wave sensor
The present invention provides a surface acoustic wave sensor capable of suitably controlling the flow of a liquid sample onto IDT electrodes. A surface acoustic wave sensor has a piezoelectric substrate, a first IDT electrode and a second IDT electrode which are located on the upper surface of the...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
02.06.2020
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Subjects | |
Online Access | Get full text |
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