Electronic systems and methods of forming semiconductor constructions
The invention includes semiconductor constructions having trenched isolation regions. The trenches of the trenched isolation regions can include narrow bottom portions and upper wide portions over the bottom portions. Electrically insulative material can fill the upper wide portions while leaving vo...
Saved in:
Main Authors | , |
---|---|
Format | Patent |
Language | English |
Published |
14.04.2020
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!