Polymer, organic layer composition, and method of forming patterns
The Chemical Formula 1 is the same as defined in the detailed description.
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
11.02.2020
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Subjects | |
Online Access | Get full text |
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Summary: | The Chemical Formula 1 is the same as defined in the detailed description. |
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Bibliography: | Application Number: US201615268706 |