Treatment liquid supply device using syringe, and wet treatment device

• Main Authors: Umino, Takeshi, Kobayashi, Akio, Khumpuang, Sommawan, Matsuda, Sonoko, Hara, Shiro
• Format: Patent
• Language: English
• Published: 19.11.2019
• Subjects: BASIC ELECTRIC ELEMENTS; CLEANING; CLEANING IN GENERAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PERFORMING OPERATIONS; PREVENTION OF FOULING IN GENERAL; SEMICONDUCTOR DEVICES; TRANSPORTING

A treatment liquid supply device and a wet treatment device with which an extremely small quantity of the treatment liquid can be accurately supplied, as a method for supplying a treatment liquid to an extremely small wafer of half inch size, including: a syringe that sucks and discharges the treatm...