System and method for control of a workpiece and a chuck
An exposure apparatus (10) for transferring one or more features to a workpiece (22) includes an illumination source (44A); (ii) a chuck (40) that retains the workpiece (22); (iii) a chamber housing (28A) that encircles the chuck and the workpiece; and (iv) a temperature controller (32) (34) that ad...
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| Main Authors | , |
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| Format | Patent |
| Language | English |
| Published |
27.08.2019
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| Subjects | |
| Online Access | Get full text |
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| Abstract | An exposure apparatus (10) for transferring one or more features to a workpiece (22) includes an illumination source (44A); (ii) a chuck (40) that retains the workpiece (22); (iii) a chamber housing (28A) that encircles the chuck and the workpiece; and (iv) a temperature controller (32) (34) that adjusts the temperature of at least one of the chuck (40) and the workpiece (22) so that a predetermined temperature differential (309) exists between the chuck (40) and the workpiece (22) before transferring the features to the workpiece (22). |
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| AbstractList | An exposure apparatus (10) for transferring one or more features to a workpiece (22) includes an illumination source (44A); (ii) a chuck (40) that retains the workpiece (22); (iii) a chamber housing (28A) that encircles the chuck and the workpiece; and (iv) a temperature controller (32) (34) that adjusts the temperature of at least one of the chuck (40) and the workpiece (22) so that a predetermined temperature differential (309) exists between the chuck (40) and the workpiece (22) before transferring the features to the workpiece (22). |
| Author | Binnard, Michael B Coon, Paul Derek |
| Author_xml | – fullname: Coon, Paul Derek – fullname: Binnard, Michael B |
| BookMark | eNrjYmDJy89L5WSwCK4sLknNVUjMS1HITS3JyE9RSMsvUkjOzyspys9RyE9TSFQozy_KLshMTU4Fq0pUSM4oTc7mYWBNS8wpTuWF0twMim6uIc4euqkF-fGpxQWJyal5qSXxocGGBsaWJobGFk5GxsSoAQDBPi9t |
| ContentType | Patent |
| DBID | EVB |
| DatabaseName | esp@cenet |
| DatabaseTitleList | |
| Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Medicine Chemistry Sciences Physics |
| ExternalDocumentID | US10394138B2 |
| GroupedDBID | EVB |
| ID | FETCH-epo_espacenet_US10394138B23 |
| IEDL.DBID | EVB |
| IngestDate | Fri Jul 19 16:08:53 EDT 2024 |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | false |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-epo_espacenet_US10394138B23 |
| Notes | Application Number: US201715698503 |
| OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190827&DB=EPODOC&CC=US&NR=10394138B2 |
| ParticipantIDs | epo_espacenet_US10394138B2 |
| PublicationCentury | 2000 |
| PublicationDate | 20190827 |
| PublicationDateYYYYMMDD | 2019-08-27 |
| PublicationDate_xml | – month: 08 year: 2019 text: 20190827 day: 27 |
| PublicationDecade | 2010 |
| PublicationYear | 2019 |
| RelatedCompanies | NIKON CORPORATION |
| RelatedCompanies_xml | – name: NIKON CORPORATION |
| Score | 3.227258 |
| Snippet | An exposure apparatus (10) for transferring one or more features to a workpiece (22) includes an illumination source (44A); (ii) a chuck (40) that retains the... |
| SourceID | epo |
| SourceType | Open Access Repository |
| SubjectTerms | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
| Title | System and method for control of a workpiece and a chuck |
| URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190827&DB=EPODOC&locale=&CC=US&NR=10394138B2 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfR3LSsNAcCj1edOoaH2wguQWbEya5BKEvChCH9hGeiu7mw2tQlJMir_v7Da1XvQ6uwyzC_N-ATx0M9mXa3GD9lhuSI_BYKgXDDMzbUG7NHNUe_Rg6PRT-2XWm7XgfdsLo-aEfqnhiMhRHPm9VvJ6tQtiRaq2snpkSwSVz8nUj_TGOzblAm9XjwI_Ho-iUaiHoZ9O9OGrLzOeKK-9AMX1njSj5Zz9-C2QXSmr3yolOYH9MWIr6lNoiUKDo3C7eU2Dw0GT8NbgQFVo8gqBDRdWZ-BtxowTWmRkswGaoOlJmqpzUuaEElVvtRRcqFuU8MWaf5zDfRJPw76BxMx_Xj5PJzu6rQtoF2UhLoEwyXauY7t2ntlSw3iCe06OzgtDA8-zrqDzN57Of4fXcCx_UQZNn9wbaNefa3GLWrdmd-q7vgEec4SJ |
| link.rule.ids | 230,309,786,891,25594,76903 |
| linkProvider | European Patent Office |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LT4NAEJ409VFvWjVaX2tiuBH7oMCFmAAlVQttLJjeyLIssZrQRmj8-85uqfWi193NZHaTeXyz8wC4a6eiLrfHVNpPMlUgBjVBu6B20o7GaZumuiyP9gN9GGlPs_6sBu-bWhjZJ_RLNkdEiWIo76XU18ttEMuVuZXFfTLHpcWDF1quUqHjjhjgbSiubQ0mY3fsKI5jRVMleLHEjyfqa9NGdb1jICSUUOnVFlUpy98mxTuE3QlSy8sjqPG8CQ1nM3mtCft-9eHdhD2ZockKXKyksDgGc91mnNA8JesJ0ARdT1JlnZNFRiiR-VZzzrg8RQl7W7GPE7j1BqEzVJGZ-OfmcTTd8t07hXq-yPkZkESInaFrhpalmrAwJmemniF4SdDBM3vn0PqbTuu_zRtoDEN_FI8eg-cLOBAvKgKoXeMS6uXnil-hBS6Ta_l033V5h3M |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=System+and+method+for+control+of+a+workpiece+and+a+chuck&rft.inventor=Coon%2C+Paul+Derek&rft.inventor=Binnard%2C+Michael+B&rft.date=2019-08-27&rft.externalDBID=B2&rft.externalDocID=US10394138B2 |