High aspect ratio X-ray targets and uses of same
An x-ray target, a method of using the x-ray target, and a computer program product with instructions for carrying out a method of using the x-ray target. The x-ray target includes a substrate made from a soft x-ray producing material and a high aspect ratio structure made from a hard x-ray producin...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
30.07.2019
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Subjects | |
Online Access | Get full text |
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