Method and device for imaging an object
At least two images (201-1-201-3) of an object (100) are obtained, wherein each image has an illumination field (110-1-110-3) associated therewith, which is associated with predetermined beam shape properties (111-1-111-3). For each one of the at least two images (201-1-201-3) an effect of the beam...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
25.06.2019
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Subjects | |
Online Access | Get full text |
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