Method and device for imaging an object

At least two images (201-1-201-3) of an object (100) are obtained, wherein each image has an illumination field (110-1-110-3) associated therewith, which is associated with predetermined beam shape properties (111-1-111-3). For each one of the at least two images (201-1-201-3) an effect of the beam...

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Bibliographic Details
Main Authors Husemann, Christoph, Stoppe, Lars
Format Patent
LanguageEnglish
Published 25.06.2019
Subjects
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