Accelerometer common mode self-test

An accelerometer has a plurality of proof masses and a plurality of sense electrodes, which collectively form at least two capacitors. A first sense drive signal is applied to a first capacitor and a second sense drive signal is applied to a second capacitor. Both of the sense drive signals have the...

Full description

Saved in:
Bibliographic Details
Main Authors Folz, Michele, Mazzarella, Federico, Musazzi, Massimiliano, Giambastiani, Adolfo, Coronato, Luca, Gafforelli, Giacomo
Format Patent
LanguageEnglish
Published 11.06.2019
Subjects
INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:An accelerometer has a plurality of proof masses and a plurality of sense electrodes, which collectively form at least two capacitors. A first sense drive signal is applied to a first capacitor and a second sense drive signal is applied to a second capacitor. Both of the sense drive signals have the same sense drive frequency. Capacitance signals are sensed from each of the first capacitor and second capacitor, and a common mode component of the capacitance signals is determined. A capacitor error is identified based on the common mode component.
Bibliography:Application Number: US201615370385