Treating arcs in a plasma process
An arc treatment device includes an arc detector operable to detect whether an arc is present in a plasma chamber, an arc energy determiner operable to determine an arc energy value based on an energy supplied to the plasma chamber while the arc is present in the plasma chamber, and a break time det...
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| Main Authors | , |
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| Format | Patent |
| Language | English |
| Published |
21.05.2019
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| Subjects | |
| Online Access | Get full text |
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| Abstract | An arc treatment device includes an arc detector operable to detect whether an arc is present in a plasma chamber, an arc energy determiner operable to determine an arc energy value based on an energy supplied to the plasma chamber while the arc is present in the plasma chamber, and a break time determiner operable to determine a break time based on the determined arc energy value. |
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| AbstractList | An arc treatment device includes an arc detector operable to detect whether an arc is present in a plasma chamber, an arc energy determiner operable to determine an arc energy value based on an energy supplied to the plasma chamber while the arc is present in the plasma chamber, and a break time determiner operable to determine a break time based on the determined arc energy value. |
| Author | Zelechowski, Marcin Lach, Piotr |
| Author_xml | – fullname: Zelechowski, Marcin – fullname: Lach, Piotr |
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| Notes | Application Number: US201715668621 |
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| RelatedCompanies | TRUMPF Huettinger Sp. z o. o |
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| Snippet | An arc treatment device includes an arc detector operable to detect whether an arc is present in a plasma chamber, an arc energy determiner operable to... |
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| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING |
| Title | Treating arcs in a plasma process |
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