Multistage sensing device

• Main Authors: Fang, Wei-Leun, Lai, Wei-Cheng
• Format: Patent
• Language: English
• Published: 30.10.2018
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

A multistage sensing device includes a substrate, a deformable unit, and a sensor unit. The deformable unit has a first body disposed on the substrate, and a second body disposed on the first body and opposite to the substrate. The sensor unit includes a first sensor element and a second sensor elem...