Bond pad structure for bonding improvement

Some embodiments relate to a three-dimensional (3D) integrated circuit (IC). The 3DIC includes a first substrate including a photodetector which is configured to receive light in a first direction from a light source. An interconnect structure is disposed over the first substrate, and includes a plu...

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Bibliographic Details
Main Authors Wang, Ming-Tsong, Yaung, Dun-Nian, Huang, Sin-Yao, Chou, Shih Pei, Wang, Ching-Chun, Hung, Feng-Chi
Format Patent
LanguageEnglish
Published 31.07.2018
Subjects
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