TWI849080B
Automated processing is provided. A charged particle beam apparatus includes: an image identity degree determination unit determining whether an identity degree is equal to or greater than a predetermined value, the identity degree indicating a degree of identity between a processing cross-section i...
Saved in:
| Main Authors | , , |
|---|---|
| Format | Patent |
| Language | Chinese |
| Published |
21.07.2024
|
| Subjects | |
| Online Access | Get full text |
Cover
Loading…
| Abstract | Automated processing is provided. A charged particle beam apparatus includes: an image identity degree determination unit determining whether an identity degree is equal to or greater than a predetermined value, the identity degree indicating a degree of identity between a processing cross-section image that is an SEM image obtained through observation of a cross section of the sample by a scanning electron microscope, and a criterion image that is the processing cross-section image previously registered; and a post-determination processing unit performing a predetermined processing operation according to a result of the determination by the image identity degree determination unit. |
|---|---|
| AbstractList | Automated processing is provided. A charged particle beam apparatus includes: an image identity degree determination unit determining whether an identity degree is equal to or greater than a predetermined value, the identity degree indicating a degree of identity between a processing cross-section image that is an SEM image obtained through observation of a cross section of the sample by a scanning electron microscope, and a criterion image that is the processing cross-section image previously registered; and a post-determination processing unit performing a predetermined processing operation according to a result of the determination by the image identity degree determination unit. |
| Author | ASAHATA, TATSUYA UEMOTO, ATSUSHI MURAKI, AYANA |
| Author_xml | – fullname: UEMOTO, ATSUSHI – fullname: MURAKI, AYANA – fullname: ASAHATA, TATSUYA |
| BookMark | eNrjYmDJy89L5WTgCgn3tDCxNLAwcOJhYE1LzClO5YXS3AwKbq4hzh66qQX58anFBYnJqXmpJfEIDU7GRCgBAL0GHUY |
| ContentType | Patent |
| DBID | EVB |
| DatabaseName | esp@cenet |
| DatabaseTitleList | |
| Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Medicine Chemistry Sciences |
| ExternalDocumentID | TWI849080BB |
| GroupedDBID | EVB |
| ID | FETCH-epo_espacenet_TWI849080BB3 |
| IEDL.DBID | EVB |
| IngestDate | Fri Oct 18 06:05:08 EDT 2024 |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | false |
| Language | Chinese |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-epo_espacenet_TWI849080BB3 |
| Notes | Application Number: TW20209108139 |
| OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240721&DB=EPODOC&CC=TW&NR=I849080B |
| ParticipantIDs | epo_espacenet_TWI849080BB |
| PublicationCentury | 2000 |
| PublicationDate | 20240721 |
| PublicationDateYYYYMMDD | 2024-07-21 |
| PublicationDate_xml | – month: 07 year: 2024 text: 20240721 day: 21 |
| PublicationDecade | 2020 |
| PublicationYear | 2024 |
| RelatedCompanies | HITACHI HIGH-TECH SCIENCE CORPORATION |
| RelatedCompanies_xml | – name: HITACHI HIGH-TECH SCIENCE CORPORATION |
| Score | 3.6885693 |
| Snippet | Automated processing is provided. A charged particle beam apparatus includes: an image identity degree determination unit determining whether an identity... |
| SourceID | epo |
| SourceType | Open Access Repository |
| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY |
| Title | TWI849080B |
| URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240721&DB=EPODOC&locale=&CC=TW&NR=I849080B |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwY2BQMbVMszRLS0rSNUg2stQ1MUuy1LU0AnZWUs0SgY2D5GQLY_BlE75-Zh6hJl4RphFMDBmwvTDgc0LLwYcjAnNUMjC_l4DL6wLEIJYLeG1lsX5SJlAo394txNZFDdo7hhz3pebiZOsa4O_i76zm7GwbEq7mF2TraQGa4TJwYmZgBTaizUF5wTXMCbQnpQC5QnETZGALAJqVVyLEwFSVIczA6Qy7d02YgcMXOt0NZEJzXrEIA1dIOMxwUQYFN9cQZw9doKHxcPfHIxQ4GYsxsAC79akSDAppoPwCrKGSLU1STMxMLJOSkyzNgZ0nE8sUYJVsmCbJIInTGCk8ctIMXKCAAI0_GhnKMLCUFJWmygIrzpIkObCfAabrb8M |
| link.rule.ids | 230,309,783,888,25576,76876 |
| linkProvider | European Patent Office |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwY2BQMbVMszRLS0rSNUg2stQ1MUuy1LU0AnZWUs0SgY2D5GQLY_BlE75-Zh6hJl4RphFMDBmwvTDgc0LLwYcjAnNUMjC_l4DL6wLEIJYLeG1lsX5SJlAo394txNZFDdo7hhz3pebiZOsa4O_i76zm7GwbEq7mF2TraQGa4TJwYmZgBTawzUF5wTXMCbQnpQC5QnETZGALAJqVVyLEwFSVIczA6Qy7d02YgcMXOt0NZEJzXrEIA1dIOMxwUQYFN9cQZw9doKHxcPfHIxQ4GYsxsAC79akSDAppoPwCrKGSLU1STMxMLJOSkyzNgZ0nE8sUYJVsmCbJIInTGCk8cvIMnB4hvj7xPp5-3tIMXKBAAY1FGhnKMLCUFJWmygIr0ZIkObD_AQ5zcrY |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=TWI849080B&rft.inventor=UEMOTO%2C+ATSUSHI&rft.inventor=MURAKI%2C+AYANA&rft.inventor=ASAHATA%2C+TATSUYA&rft.date=2024-07-21&rft.externalDBID=B&rft.externalDocID=TWI849080BB |