TWI837341B

An objective of the present invention is to make the drying time of a solution on a substrate more uniform within a plane of a substrate. A decompression drying apparatus for drying a solution applied on a substrate in a decompression state has a solvent collection unit temporarily collecting a solv...

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Bibliographic Details
Main Authors KONTA, YU, OSHIMA, KIYOMI, TOHARA, ATSUSHI, SHIMAMURA, AKINORI, HAYASHI, TERUYUKI
Format Patent
LanguageChinese
Published 01.04.2024
Subjects
BASIC ELECTRIC ELEMENTS
BLASTING
DRYING
DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HEATING
LIGHTING
MECHANICAL ENGINEERING
SEMICONDUCTOR DEVICES
WEAPONS
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Summary:An objective of the present invention is to make the drying time of a solution on a substrate more uniform within a plane of a substrate. A decompression drying apparatus for drying a solution applied on a substrate in a decompression state has a solvent collection unit temporarily collecting a solvent in the solution vaporized from the substrate. The solvent collection unit is disposed to face the substrate, and divided into a plurality of areas. An opening is formed in each of the plurality of areas. The heat capacity per unit area of each of the plurality of areas is formed differently depending on a portion of the substrate facing the areas.
Bibliography:Application Number: TW20209111598