Method for measuring and correcting misregistration between layers in a semiconductor device, and misregistration targets useful therein

• Main Authors: VOLKOVICH, ROIE, ZABERCHIK, MORAN, YERUSHALMI, LIRAN, MILO, RENAN, IZRAELI, DAVID, FELER, YOEL
• Format: Patent
• Language: Chinese; English
• Published: 21.03.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A method for measurement of misregistration in the manufacture of semiconductor device wafers, the method including measuring misregistration between layers of a semiconductor device wafer at a first instance and providing a first misregistration indication, measuring misregistration between layers...