Quick disconnect resistance temperature detector assembly for rotating pedestal

• Main Authors: PURATHE, VINOD KONDA, RASHEED, MUHAMMAD M, CHANG, YU, MUSTAFA, MUHANNAD, KUANG, WILLIAM, KOPPA, MANJUNATHA, SANCHEZ, MARIO DAN
• Format: Patent
• Language: Chinese; English
• Published: 01.11.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING QUANTITY OF HEAT; MEASURING TEMPERATURE; PHYSICS; SEMICONDUCTOR DEVICES; TESTING; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR

Embodiments of the present disclosure are directed to a quick disconnect resistance temperature detector (RTD) heater assembly, that includes a first assembly comprising a pedestal, a pedestal shaft, an adapter, one or more heater power supply terminals, and at least one RTD, and a second assembly c...