Metrology systems and methods for measuring overlay

• Main Authors: SHUALL, NIMROD, GREADY, DAVID, STANIUNAS, CLAIRE
• Format: Patent
• Language: Chinese; English
• Published: 21.05.2022
• Subjects: CALCULATING; COMPUTING; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; COUNTING; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING

A metrology system includes a controller coupled to a detector to image a sample based on the light captured by an objective lens, where an object plane of the detector with respect to the sample is adjustable. The controller may direct the detector to generate reference images of an overlay target...