Wafer chuck apparatus with micro-channel regions

The wafer chuck apparatus has a chuck body that includes an interior and a top surface. A plurality of micro-channel regions is formed in the top surface. Each micro-channel region is defined by an array of micro-channel sections that are in pneumatic communication with each other. The micro-channel...

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Bibliographic Details
Main Authors CRESPIN, A.J, ELLIS, RAYMOND
Format Patent
LanguageChinese
English
Published 21.02.2022
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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