Method for manufacturing gas sensor

A gas sensor and a method for manufacturing the gas sensor are disclosed. The gas sensor includes a substrate, a heating member disposed on the substrate, a sensing layer covering the heating member, and two electrodes respectively electrically connected to the sensing layer. The sensing layer inclu...

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Main Authors LIN, SHIH-KAI, LIN, CHUNU, TSENG, YI-TING, CHEN, PO-HSUN, CHEN, WENUNG, CHANG, TINGANG
Format Patent
LanguageChinese
English
Published 21.10.2021
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Abstract A gas sensor and a method for manufacturing the gas sensor are disclosed. The gas sensor includes a substrate, a heating member disposed on the substrate, a sensing layer covering the heating member, and two electrodes respectively electrically connected to the sensing layer. The sensing layer includes a doping element with an electronegativity greater than 2. The method for manufacturing the gas sensor includes a deposition process stacking a heating member, a sensing layer, and two electrodes on a substrate by deposition, and a doping process introducing a doping gas when depositing the sensing layer.
AbstractList A gas sensor and a method for manufacturing the gas sensor are disclosed. The gas sensor includes a substrate, a heating member disposed on the substrate, a sensing layer covering the heating member, and two electrodes respectively electrically connected to the sensing layer. The sensing layer includes a doping element with an electronegativity greater than 2. The method for manufacturing the gas sensor includes a deposition process stacking a heating member, a sensing layer, and two electrodes on a substrate by deposition, and a doping process introducing a doping gas when depositing the sensing layer.
Author LIN, SHIH-KAI
CHEN, WENUNG
CHANG, TINGANG
CHEN, PO-HSUN
TSENG, YI-TING
LIN, CHUNU
Author_xml – fullname: LIN, SHIH-KAI
– fullname: LIN, CHUNU
– fullname: TSENG, YI-TING
– fullname: CHEN, PO-HSUN
– fullname: CHEN, WENUNG
– fullname: CHANG, TINGANG
BookMark eNrjYmDJy89L5WRQ9k0tychPUUjLL1LITcwrTUtMLiktysxLV0hPLFYoTs0rzi_iYWBNS8wpTuWF0twMCm6uIc4euqkF-fGpxQWJyal5qSXxIeGe5ibGlhamTk7GRCgBAIk3KGs
ContentType Patent
DBID EVB
DatabaseName esp@cenet
DatabaseTitleList
Database_xml – sequence: 1
  dbid: EVB
  name: esp@cenet
  url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP
  sourceTypes: Open Access Repository
DeliveryMethod fulltext_linktorsrc
Discipline Medicine
Chemistry
Sciences
Physics
ExternalDocumentID TWI743985BB
GroupedDBID EVB
ID FETCH-epo_espacenet_TWI743985BB3
IEDL.DBID EVB
IngestDate Fri Jul 19 15:01:51 EDT 2024
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Language Chinese
English
LinkModel DirectLink
MergedId FETCHMERGED-epo_espacenet_TWI743985BB3
Notes Application Number: TW20209131323
OpenAccessLink https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20211021&DB=EPODOC&CC=TW&NR=I743985B
ParticipantIDs epo_espacenet_TWI743985BB
PublicationCentury 2000
PublicationDate 20211021
PublicationDateYYYYMMDD 2021-10-21
PublicationDate_xml – month: 10
  year: 2021
  text: 20211021
  day: 21
PublicationDecade 2020
PublicationYear 2021
RelatedCompanies NATIONAL SUN YAT-SEN UNIVERSITY
RelatedCompanies_xml – name: NATIONAL SUN YAT-SEN UNIVERSITY
Score 3.488652
Snippet A gas sensor and a method for manufacturing the gas sensor are disclosed. The gas sensor includes a substrate, a heating member disposed on the substrate, a...
SourceID epo
SourceType Open Access Repository
SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
Title Method for manufacturing gas sensor
URI https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20211021&DB=EPODOC&locale=&CC=TW&NR=I743985B
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwY2BQAZ0pYmRinqiblGpqpmuSkmaqm5QGbMiBTyO3sARWUZag_c6-fmYeoSZeEaYRTAwZsL0w4HNCy8GHIwJzVDIwv5eAy-sCxCCWC3htZbF-UiZQKN_eLcTWRQ3aOwb1ZowM1VycbF0D_F38ndWcnW1DwtX8gmw9QQ1vC1MnZgZWYCPaHLT4yzXMCbQnpQC5QnETZGALAJqVVyLEwFSVIczA6Qy7d02YgcMXOt0tzMAOXp-ZXAwUhObBYhEGZV_wpc8KwNamQm5iXiloawJ4r6FCemKxQjGwW5pfJMqg4OYa4uyhC7Q3Hu7F-JBwmAOdjMUYWIA9_1QJBoVkMxODlLREo0RLUEMnKdXCPM3U0jIVGKLJliaGhmmSDJI4jZHCIyfNwAUKK1ARbGQow8BSUlSaKgusW0uS5MDBAgBRD33W
link.rule.ids 230,309,783,888,25578,76884
linkProvider European Patent Office
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LT4NAEJ7U-qg3RY31uYmGG1EQKHsgJrxCtdDGoO2NAAXrwbYpNCb-emc3oF70upvsY5KZ-WZ3v28BrpmmiKL2EinNNV1Sp4UmpQUCOa5GblBMUZTxnYNQ95_Vh4k2acGs4cJwndAPLo6IHpWhv1c8Xi9_DrEc_rayvEnfsGlx70WmI9bVMatmFFl0LNMdDZ2hLdq2GY3F8MnsM-BtaNYGbCLANpjKvvtiMU7K8ndC8fZga4Rjzat9aH3OBOjYzb9rAuwE9XW3ANv8fWZWYmPtg-UBXAX802eCaJO8J_M1oyZwriF5TUpSYlm6WB0C8dzI9iWcN_7eYhyNmwVad0fQxso_PwaS6erttEiUhDKgk-ZGr9AozdGiGVVluehC989hTv7pu4SOHwWDeNAPH09hl9mNhWNFPoN2tVrn55hnq_SCm-gLX6WAxg
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Method+for+manufacturing+gas+sensor&rft.inventor=LIN%2C+SHIH-KAI&rft.inventor=LIN%2C+CHUNU&rft.inventor=TSENG%2C+YI-TING&rft.inventor=CHEN%2C+PO-HSUN&rft.inventor=CHEN%2C+WENUNG&rft.inventor=CHANG%2C+TINGANG&rft.date=2021-10-21&rft.externalDBID=B&rft.externalDocID=TWI743985BB