TWI739340B

• Main Authors: UEDA, AKIRA, YAMAGUCHI, MASAFUMI, MASUDA, KATSUHIRO
• Format: Patent
• Language: Chinese
• Published: 11.09.2021
• Subjects: AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING; BLASTING; HEATING; LIGHTING; MECHANICAL ENGINEERING; RANGES; VENTILATING; WEAPONS

[Problem] To provide a low-humidity air supply device with which it is possible to achieve size reduction.[Solution] A low-humidity air supply device 1 supplies low-humidity air into a clean room 100. The low-humidity air supply device 1 includes an intake portion 3 that is connected to an inside of...