TWI739340B

[Problem] To provide a low-humidity air supply device with which it is possible to achieve size reduction.[Solution] A low-humidity air supply device 1 supplies low-humidity air into a clean room 100. The low-humidity air supply device 1 includes an intake portion 3 that is connected to an inside of...

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Bibliographic Details
Main Authors UEDA, AKIRA, YAMAGUCHI, MASAFUMI, MASUDA, KATSUHIRO
Format Patent
LanguageChinese
Published 11.09.2021
Subjects
AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
RANGES
VENTILATING
WEAPONS
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Summary:[Problem] To provide a low-humidity air supply device with which it is possible to achieve size reduction.[Solution] A low-humidity air supply device 1 supplies low-humidity air into a clean room 100. The low-humidity air supply device 1 includes an intake portion 3 that is connected to an inside of the clean room 100 and through which air AR1 in the clean room 100 is taken in, a cooling unit 4 that cools the air AR1, a dehumidification unit 7 that dehumidifies cooled air AR2, and a supply unit 8 that is connected to the inside of the clean room 100 and through which air AR4 dehumidified by the dehumidification unit 7 is supplied into the clean room 100. The supply unit 8 is composed of a duct 81 through which the air AR4 is able to pass and that has a box shape and the duct 81 is a portion of a casing 20 that constitutes an outermost layer of the low-humidity air supply device 1.
Bibliography:Application Number: TW20209108140