Sensor element for a pressure sensor

• Main Authors: FREY, TOBIAS SEBASTIAN, MITSCHKE, MICHAELA, ZEHRINGER, STEFAN, FIX, RICHARD, FRANZ, JOCHEN, LESTYAN, ZOLTAN
• Format: Patent
• Language: Chinese; English
• Published: 21.06.2021
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; MEASURING QUANTITY OF HEAT; MEASURING TEMPERATURE; PHYSICS; TESTING; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR

A sensor element for a pressure sensor, includes a sensor membrane on which a defined number of piezoresistors are situated, the piezoresistors being configured in a circuit in such a way that, when there is a change in pressure an electrical change in voltage can be generated; at least two temperat...