Plasma reactor having digital control over rotation frequency of a microwave field with direct up-conversion

A plasma reactor for processing a workpiece has a microwave source with a digitally synthesized rotation frequency using direct digital up-conversion and a user interface for controlling the rotation frequency.

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Bibliographic Details
Main Authors LUBOMIRSKY, DMITRY, KOBAYASHI, SATORU, PARK, SOONAM, SUGAI, HIDEO, RAMASWAMY, KARTIK
Format Patent
LanguageChinese
English
Published 01.06.2021
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:A plasma reactor for processing a workpiece has a microwave source with a digitally synthesized rotation frequency using direct digital up-conversion and a user interface for controlling the rotation frequency.
Bibliography:Application Number: TW20198128230