A pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus

• Main Authors: RENCKENS, THEODORUS JOHANNES ANTONIUS, HEEREN, ADRIANUS MARINUS WOUTER, JANSSENS, STEF MARTEN JOHAN, GOSEN, JEROEN GERARD, SCHELLENS, HENDRIKUS JOHANNES, LENSSEN, BO, CUYPERS, KOEN, CORTIE, ROGIER HENDRIKUS MAGDALENA, SRIVASTAVA, SUDHIR, EUMMELEN, ERIK HENRICUS EGIDIUS CATHARINA
• Format: Patent
• Language: Chinese; English
• Published: 01.03.2020
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

A pressure control valve has: a passageway having a flow opening; an member displaceable relative to the opening for obstructing the opening by differing amounts; a piezo actuator; and a linkage mechanism adapted to amplify a dimensional change in the piezo actuator and to use the amplified dimensio...