Etchant composition for copper layer and titanium layer and method of preparing array substrate for liquid crystal display using the same
The invention discloses an etching solution composition for a copper layer and a titanium layer and a method of preparing an array substrate for a liquid crystal display using the same. The etching solution composition comprises persulphate and sulfosalicylic acid, so that the multiple metallic laye...
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
01.10.2018
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Subjects | |
Online Access | Get full text |
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Summary: | The invention discloses an etching solution composition for a copper layer and a titanium layer and a method of preparing an array substrate for a liquid crystal display using the same. The etching solution composition comprises persulphate and sulfosalicylic acid, so that the multiple metallic layers including copper layers and titanium layers can be uniformly etched in at a high speed in an environmental-friendly way. Excellent thermal control performance and time stability are ensured. |
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Bibliography: | Application Number: TW20154104803 |