Load lock chamber and the cluster tool system using the same

Disclosed is a load lock chamber which includes a chamber body including: at least one pair of cavities, defined in a layer structure of the chamber body to carry one or more wafer substrates; at least one internal conduit, defined between and coupled with the paired cavities, such that the paired c...

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Main Authors CHANG, SEAN, LIAN, JIE, PHAM, XUYEN, LU, BRIAN, FANG, SHICAI, ZHOU, REN, MEN, ENGUO
Format Patent
LanguageChinese
English
Published 01.09.2018
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Abstract Disclosed is a load lock chamber which includes a chamber body including: at least one pair of cavities, defined in a layer structure of the chamber body to carry one or more wafer substrates; at least one internal conduit, defined between and coupled with the paired cavities, such that the paired cavities are communicated with each other and capable of conducting gas refilling and exhaustion; and a plurality of wafer supports for carrying the wafer substrates, the plurality of wafer supports being securely received in the paired cavities and able to calibrate with a machine arm frontend finger, wherein the wafer support includes grooves defined thereon for calibrating the machine arm frontend finger.
AbstractList Disclosed is a load lock chamber which includes a chamber body including: at least one pair of cavities, defined in a layer structure of the chamber body to carry one or more wafer substrates; at least one internal conduit, defined between and coupled with the paired cavities, such that the paired cavities are communicated with each other and capable of conducting gas refilling and exhaustion; and a plurality of wafer supports for carrying the wafer substrates, the plurality of wafer supports being securely received in the paired cavities and able to calibrate with a machine arm frontend finger, wherein the wafer support includes grooves defined thereon for calibrating the machine arm frontend finger.
Author LU, BRIAN
ZHOU, REN
FANG, SHICAI
LIAN, JIE
PHAM, XUYEN
MEN, ENGUO
CHANG, SEAN
Author_xml – fullname: CHANG, SEAN
– fullname: LIAN, JIE
– fullname: PHAM, XUYEN
– fullname: LU, BRIAN
– fullname: FANG, SHICAI
– fullname: ZHOU, REN
– fullname: MEN, ENGUO
BookMark eNrjYmDJy89L5WSw8clPTFHIyU_OVkjOSMxNSi1SSMxLUSjJSFVIziktLgHyS_LzcxSKK4HsXIXS4sy8dLBscWJuKg8Da1piTnEqL5TmZlBwcw1x9tBNLciPTy0uSExOzUstiQ8J9zQzNjEzNHJyMiZCCQBcBjEY
ContentType Patent
DBID EVB
DatabaseName esp@cenet
DatabaseTitleList
Database_xml – sequence: 1
  dbid: EVB
  name: esp@cenet
  url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP
  sourceTypes: Open Access Repository
DeliveryMethod fulltext_linktorsrc
Discipline Medicine
Chemistry
Sciences
ExternalDocumentID TWI634612BB
GroupedDBID EVB
ID FETCH-epo_espacenet_TWI634612BB3
IEDL.DBID EVB
IngestDate Fri Jul 19 15:26:52 EDT 2024
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Language Chinese
English
LinkModel DirectLink
MergedId FETCHMERGED-epo_espacenet_TWI634612BB3
Notes Application Number: TW20165112394
OpenAccessLink https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20180901&DB=EPODOC&CC=TW&NR=I634612B
ParticipantIDs epo_espacenet_TWI634612BB
PublicationCentury 2000
PublicationDate 20180901
PublicationDateYYYYMMDD 2018-09-01
PublicationDate_xml – month: 09
  year: 2018
  text: 20180901
  day: 01
PublicationDecade 2010
PublicationYear 2018
RelatedCompanies PIOTECH CO., LTD
RelatedCompanies_xml – name: PIOTECH CO., LTD
Score 3.284274
Snippet Disclosed is a load lock chamber which includes a chamber body including: at least one pair of cavities, defined in a layer structure of the chamber body to...
SourceID epo
SourceType Open Access Repository
SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Title Load lock chamber and the cluster tool system using the same
URI https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20180901&DB=EPODOC&locale=&CC=TW&NR=I634612B
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1bS8MwFD7MKeqbTsV5Iw_St6K9ZXuwCL0xRbch1e1tJGlqxdkO2yH4602yVn3Rt5DAITlw8uXyne8AnFNspQ4llk568rXqMqU6IZahmyazUpaYAiEUy3eIB4_27dSZtiBrcmGUTuiHEkcUEcVEvFdqv178PGIFiltZXtAX0VVcR7EbaPXtWIpRibtx4LnheBSMfM333XiiDR_cG2zZAsy9NViXh2ipsh8-eTInZfEbUKId2BgLW3m1C63PrANbflN3rQOb9_V3t2jWkVfuwdVdQRIkkOcVsYzIKh6I5AkSxzfE5kupdoCqopijlTIzknT2ZzVakje-DygKY3-gi2nMvlc8iyfNfD3rANp5kfNDQJz1MLFpYpgJtx3OKe7zPuUGJglJqc260P3TzNE_Y8ewLV23Yk6dQLt6X_JTAbUVPVNe-gLpPIVr
link.rule.ids 230,309,786,891,25594,76903
linkProvider European Patent Office
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3PT8IwFH5BNOJNUSP-7MFwW3Q_2Di4mGyDgMIgZgq3pe06MeJGZMTEv97XAupFb02bvLw2ef362u99Bbhktpk2GDU16sjbquuUaZSaumYY3Ex5YiBCKJZvaHcerbtxY1yCyboWRumEfihxRIwojvFeqP169nOJFShu5fyKvWBXftuO3KC-yo6lGBXmxoHntoaDYODXfd-NRvXwwe3apoVg7m3ApoMJoUqUnjxZkzL7DSjtXdgaoq2s2IPS56QKFX_971oVtvur525sriJvvg83vZwmBJHnlfAJlb94EJolBI9vhE8XUu2AFHk-JUtlZiLp7M9qdE7fxAGQdivyOxq6EX_POI5Ga3898xDKWZ6JIyCCOza1WKIbibAaQjC7KZpM6DZNaMosXoPan2aO_xm7gEon6vfiXje8P4EduYxLFtUplIv3hThD2C3YuVqxL0tJiFU
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Load+lock+chamber+and+the+cluster+tool+system+using+the+same&rft.inventor=CHANG%2C+SEAN&rft.inventor=LIAN%2C+JIE&rft.inventor=PHAM%2C+XUYEN&rft.inventor=LU%2C+BRIAN&rft.inventor=FANG%2C+SHICAI&rft.inventor=ZHOU%2C+REN&rft.inventor=MEN%2C+ENGUO&rft.date=2018-09-01&rft.externalDBID=B&rft.externalDocID=TWI634612BB