Manufacturing method for deposition mask
To provide a production method including: a first step of forming a mask member in which a resin film and a magnetic metal member, which has first through-holes and second through-holes, are brought into close contact; a second step in which a peripheral edge of the magnetic metal member is bonded t...
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| Main Author | |
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| Format | Patent |
| Language | Chinese English |
| Published |
11.06.2017
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| Subjects | |
| Online Access | Get full text |
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| Abstract | To provide a production method including: a first step of forming a mask member in which a resin film and a magnetic metal member, which has first through-holes and second through-holes, are brought into close contact; a second step in which a peripheral edge of the magnetic metal member is bonded to one end face of a frame; and a third step in which a portion of the film in each first through-hole is irradiated with laser light to form an opening pattern, and a portion of the film in each second through-hole is irradiated with laser light to form a mask-side alignment mark. |
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| AbstractList | To provide a production method including: a first step of forming a mask member in which a resin film and a magnetic metal member, which has first through-holes and second through-holes, are brought into close contact; a second step in which a peripheral edge of the magnetic metal member is bonded to one end face of a frame; and a third step in which a portion of the film in each first through-hole is irradiated with laser light to form an opening pattern, and a portion of the film in each second through-hole is irradiated with laser light to form a mask-side alignment mark. |
| Author | MIZUMURA, MICHINOBU |
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| Notes | Application Number: TW20132141381 |
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| PublicationDateYYYYMMDD | 2017-06-11 |
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| PublicationYear | 2017 |
| RelatedCompanies | V TECHNOLOGY CO., LTD |
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| Snippet | To provide a production method including: a first step of forming a mask member in which a resin film and a magnetic metal member, which has first... |
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| SubjectTerms | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
| Title | Manufacturing method for deposition mask |
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